Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik +6 more | 2018-10-23 |
| 10043709 | Methods for thermally forming a selective cobalt layer | Hua Ai, Jiang Lu, Avgerinos V. Gelatos, Sang Ho Yu, Feng Q. Liu +2 more | 2018-08-07 |
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more | 2018-07-03 |
| 10008412 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Guodan Wei, Nicole Lundy | 2018-06-26 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Mehul Naik, Tae Hong Ha, Srinivas Guggilla | 2018-06-19 |
| 9953926 | Methods of depositing cobalt manganese films | Sang Ho Yu, Jiang Lu, Ben-Li Sheu | 2018-04-24 |
| 9914632 | Methods and apparatus for liquid chemical delivery | Ilker Durukan, Muhammad M. Rasheed | 2018-03-13 |