Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn +2 more | 2018-12-18 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik, David Thompson +6 more | 2018-10-23 |
| 9984976 | Interconnect structures and methods of formation | Yana Cheng, Yong Cao, Srinivas Guggilla, Xianmin Tang, Deenesh Padhi | 2018-05-29 |