Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113234 | UV assisted silylation for porous low-k film sealing | Bo Xie, Alexandros T. Demos, Vu Ngoc Tran Nguyen, Kelvin Chan, He Ren +1 more | 2018-10-30 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Kevin Moraes, Srinivas Guggilla, He Ren, David Thompson +6 more | 2018-10-23 |
| 10062607 | Methods for producing interconnects in semiconductor devices | Ismail Emesh, Roey Shaviv | 2018-08-28 |
| 10049927 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Ellie Yieh +1 more | 2018-08-14 |
| 10008448 | Dielectric/metal barrier integration to prevent copper diffusion | He Ren, Yong Cao, Mei-Yee Shek | 2018-06-26 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Paul F. Ma, Tae Hong Ha, Srinivas Guggilla | 2018-06-19 |
| 9865466 | Silicide phase control by confinement | Bencherki Mebarki, Ellie Yieh, Srinivas D. Nemani | 2018-01-09 |