Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153187 | Methods and apparatus for transferring a substrate | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula | 2018-12-11 |
| 10128337 | Methods for forming fin structures with desired profile for 3D structure semiconductor applications | Jie Zhou, Zhong Qiang Hua, Chentsau Chris Ying, Srinivas D. Nemani | 2018-11-13 |
| 10096496 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Sergey G. Belostotskiy | 2018-10-09 |
| 10096512 | Gapfill film modification for advanced CMP and recess flow | Erica Chen, Ludovic Godet, Srinivas D. Nemani | 2018-10-09 |
| 10049927 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik +1 more | 2018-08-14 |
| 9911594 | Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications | Srinivas D. Nemani, Ludovic Godet, Yin Fan | 2018-03-06 |
| 9865466 | Silicide phase control by confinement | Bencherki Mebarki, Mehul Naik, Srinivas D. Nemani | 2018-01-09 |