Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153187 | Methods and apparatus for transferring a substrate | Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh | 2018-12-11 |
| 10154586 | Apparatus and method for solid state source array design and fabrication | Joseph R. Johnson | 2018-12-11 |
| 9993853 | Method and apparatus for backside cleaning of substrates | Jen Sern Lew, Arvind Sundarrajan, Srinivas D. Nemani | 2018-06-12 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH +1 more | 2018-05-01 |