Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9993853 | Method and apparatus for backside cleaning of substrates | Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Srinivas D. Nemani | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9993853 | Method and apparatus for backside cleaning of substrates | Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Srinivas D. Nemani | 2018-06-12 |