Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115573 | Apparatus for high compressive stress film deposition to improve kit life | Junqi Wei, Kirankumar Neelasandra SAVANDAIAH, Ananthkrishna Jupudi, Zhitao Cao | 2018-10-30 |
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH, Xin Wang +1 more | 2018-05-01 |
| 9960035 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Ananthkrishna Jupudi, Glen T. Mori, Aksel Kitowski +1 more | 2018-05-01 |