Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960023 | Methods and apparatus for nodule control in a titanium-tungsten target | Junqi Wei, Zhitao Cao, Yueh Sheng Ow, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH +1 more | 2018-05-01 |
| 9953812 | Integrated process kit for a substrate processing chamber | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Prashant Prabhakar Prabhu | 2018-03-06 |