Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953812 | Integrated process kit for a substrate processing chamber | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Xin Wang | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | William Johanson, Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Xin Wang | 2018-03-06 |