Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103012 | One-piece process kit shield for reducing the impact of an electric field near the substrate | Kirankumar Neelasandra SAVANDAIAH | 2018-10-16 |
| D825504 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Yu Liu, Adolph Miller Allen, Brij Datta, Keith A. Miller | 2018-08-14 |
| 9991101 | Magnetron assembly for physical vapor deposition chamber | Brij Datta, Fuhong Zhang, Adolph Miller Allen, Yu Liu, Prashanth Kothnur | 2018-06-05 |
| 9953812 | Integrated process kit for a substrate processing chamber | Kirankumar Neelasandra SAVANDAIAH, Xin Wang, Prashant Prabhakar Prabhu | 2018-04-24 |
| 9909206 | Process kit having tall deposition ring and deposition ring clamp | Kirankumar Neelasandra SAVANDAIAH, Adolph Miller Allen, Xin Wang, Prashant Prabhakar Prabhu | 2018-03-06 |