Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991101 | Magnetron assembly for physical vapor deposition chamber | William Johanson, Brij Datta, Fuhong Zhang, Adolph Miller Allen, Yu Liu | 2018-06-05 |
| 9928997 | Apparatus for PVD dielectric deposition | Keith A. Miller, Thanh X. Nguyen, Ilya Lavitsky, Randy D. Schmieding | 2018-03-27 |