Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D825504 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, William Johanson, Yu Liu, Adolph Miller Allen, Brij Datta | 2018-08-14 |
| 9984911 | Electrostatic chuck design for high temperature RF applications | Ryan Edwin Hanson, Manjunatha Koppa, Vijay D. Parkhe, John C. Forster | 2018-05-29 |
| 9957601 | Apparatus for gas injection in a physical vapor deposition chamber | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie, Isaac Porras | 2018-05-01 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Muhammad M. Rasheed, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9928997 | Apparatus for PVD dielectric deposition | Thanh X. Nguyen, Ilya Lavitsky, Randy D. Schmieding, Prashanth Kothnur | 2018-03-27 |