Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121655 | Lateral plasma/radical source | Anantha K. Subramani, Kaushal Gangakhedkar, Abhishek Chowdhury, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |
| 10099245 | Process kit for deposition and etching | Zhenbin Ge, Alan A. Ritchie | 2018-10-16 |
| 10047430 | Self-ionized and inductively-coupled plasma for sputtering and resputtering | Peijun Ding, Rong Tao, Zheng Xu, Daniel C. Lubben, Suraj Rengarajan +7 more | 2018-08-14 |
| 9984911 | Electrostatic chuck design for high temperature RF applications | Ryan Edwin Hanson, Manjunatha Koppa, Vijay D. Parkhe, Keith A. Miller | 2018-05-29 |