Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121655 | Lateral plasma/radical source | Kaushal Gangakhedkar, Abhishek Chowdhury, John C. Forster, Nattaworn Nuntaworanuch, Kallol Bera +2 more | 2018-11-06 |
| 10109481 | Aluminum-nitride buffer and active layers by physical vapor deposition | Mingwei Zhu, Nag B. Patibandla, Rongjun Wang, Vivek Agrawal, Daniel Lee Diehl +1 more | 2018-10-23 |
| 9929310 | Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandia, Rongjun Wang, Daniel Lee Diehl, Vivek Agrawal | 2018-03-27 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Joseph M. Ranish, Xiaoxiong Yuan, Ashish Goel, Joung Joo Lee | 2018-02-27 |
| 9863038 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish | 2018-01-09 |