Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109481 | Aluminum-nitride buffer and active layers by physical vapor deposition | Mingwei Zhu, Nag B. Patibandla, Vivek Agrawal, Anantha K. Subramani, Daniel Lee Diehl +1 more | 2018-10-23 |
| 10096455 | Extended dark space shield | Thanh X. Nguyen, Muhammad M. Rasheed, Xianmin Tang | 2018-10-09 |
| 10096725 | Method for graded anti-reflective coatings by physical vapor deposition | Yong Cao, Daniel Lee Diehl, Xianmin Tang, TAI-CHOU PAPO CHEN, Tingjun Xu | 2018-10-09 |
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2018-08-28 |
| 9929310 | Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandia, Daniel Lee Diehl, Vivek Agrawal, Anantha K. Subramani | 2018-03-27 |