Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Tza-Jing Gung, Muhammad M. Rasheed | 2018-08-28 |
| 9978685 | Conformal amorphous silicon as nucleation layer for W ALD process | Yihong Chen, Kelvin Chan | 2018-05-22 |
| 9922872 | Tungsten films by organometallic or silane pre-treatment of substrate | David Knapp, Jeffrey W. Anthis, Xinyu Fu | 2018-03-20 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Chien-Teh Kao, Benjamin Schmiege, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei +7 more | 2018-01-30 |