Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121671 | Methods of depositing metal films using metal oxyhalide precursors | David Knapp, David Thompson, Jeffrey W. Anthis, Mei Chang | 2018-11-06 |
| 10043709 | Methods for thermally forming a selective cobalt layer | Hua Ai, Jiang Lu, Avgerinos V. Gelatos, Paul F. Ma, Sang Ho Yu +2 more | 2018-08-07 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Yi Xu, Kazuya Daito +9 more | 2018-04-17 |
| 9922872 | Tungsten films by organometallic or silane pre-treatment of substrate | David Knapp, Jeffrey W. Anthis, Srinivas Gandikota | 2018-03-20 |