Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163630 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel | Bo Zheng, Anshul Ashok Vyas, Raymond Hung | 2018-12-25 |
| 10163656 | Methods for dry etching cobalt metal using fluorine radicals | Bhushan Zope | 2018-12-25 |
| 10043709 | Methods for thermally forming a selective cobalt layer | Hua Ai, Jiang Lu, Paul F. Ma, Sang Ho Yu, Feng Q. Liu +2 more | 2018-08-07 |
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Ping Han Hsieh, Teng-Fang Kuo, Shi Wei Toh | 2018-06-26 |
| 9966275 | Methods of treating nitride films | Brent Biggs, Takashi Kuratomi, Mark Lee | 2018-05-08 |