Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020218 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Zhenwen Ding | 2018-07-10 |
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Ping Han Hsieh, Shi Wei Toh, Avgerinos V. Gelatos | 2018-06-26 |
| 9870921 | Cleaning method | Christopher S. Olsen, Peter Stone, Ping Han Hsieh, Manoj Vellaikal | 2018-01-16 |