Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more | 2018-08-14 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Emre Cuvalci, Lara Hawrylchak | 2018-01-16 |
| 9870921 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2018-01-16 |