Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020186 | Silicon germanium selective oxidation process | — | 2018-07-10 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Christopher S. Olsen, Emre Cuvalci, Lara Hawrylchak | 2018-01-16 |