Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Ken Kaung Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2018-08-14 |
| 10020187 | Apparatus and methods for backside passivation | Jeff Tobin | 2018-07-10 |
| 9978569 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2018-05-22 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Christopher S. Olsen, Emre Cuvalci | 2018-01-16 |