Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Christopher S. Olsen, Lara Hawrylchak | 2018-01-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Christopher S. Olsen, Lara Hawrylchak | 2018-01-16 |