Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2018-11-13 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more | 2018-08-14 |
| 9929029 | Substrate carrier system | — | 2018-03-27 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU | 2018-02-27 |