Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141191 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Dean Jennings, Abhilash J. Mayur, Stephen Moffatt, William Schaffer +2 more | 2018-11-27 |
| 10128197 | Bottom processing | Joseph M. Ranish, Swaminathan Srinivasan | 2018-11-13 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10094618 | Ambient laminar gas flow distribution in laser processing systems | Stephen Moffatt | 2018-10-09 |
| 10074538 | Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods | Bruce E. Adams, Stephen Moffatt | 2018-09-11 |
| 10056286 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |
| 10053777 | Thermal processing chamber | Joseph M. Ranish | 2018-08-21 |
| 10020204 | Bottom processing | Joseph M. Ranish, Swaminathan Srinivasan | 2018-07-10 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Bruce E. Adams, Kim Vellore, Samuel C. Howells, Stephen Moffatt | 2018-04-24 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams +1 more | 2018-03-27 |
| 9909925 | Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction | Heng Pan, Matthew S. Rogers, Stephen Moffatt | 2018-03-06 |