Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109514 | Visual feedback for process control in RTP chambers | Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Schubert S. Chu, Shay Assaf, Zhepeng CONG | 2018-05-01 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Stephen Moffatt | 2018-04-24 |