Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141191 | Method of thermal processing structures formed on a substrate | Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more | 2018-11-27 |
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |
| 10094618 | Ambient laminar gas flow distribution in laser processing systems | Aaron Muir Hunter | 2018-10-09 |
| 10074538 | Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods | Bruce E. Adams, Aaron Muir Hunter | 2018-09-11 |
| 10061208 | Photonic activation of reactants for sub-micron feature formation using depleted beams | James Francis Mack | 2018-08-28 |
| 9953851 | Process sheet resistance uniformity improvement using multiple melt laser exposures | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells | 2018-04-24 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2018-03-27 |
| 9909925 | Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction | Heng Pan, Matthew S. Rogers, Aaron Muir Hunter | 2018-03-06 |
| 9908200 | Apparatus and method of improving beam shaping and beam homogenization | Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas | 2018-03-06 |
| 9904069 | Apparatus and method for speckle reduction in laser processing equipment | — | 2018-02-27 |
| 9869938 | Photonic activation of reactants for sub-micron feature formation using depleted beams | James Francis Mack | 2018-01-16 |