| 10141191 |
Method of thermal processing structures formed on a substrate |
Paul G. Carey, Aaron Muir Hunter, Dean Jennings, Abhilash J. Mayur, William Schaffer +2 more |
2018-11-27 |
| 10109514 |
Visual feedback for process control in RTP chambers |
Kim Vellore, Dinesh Kanawade, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more |
2018-10-23 |
| 10094618 |
Ambient laminar gas flow distribution in laser processing systems |
Aaron Muir Hunter |
2018-10-09 |
| 10074538 |
Methods for crystallizing a substrate using a plurality of laser pulses and freeze periods |
Bruce E. Adams, Aaron Muir Hunter |
2018-09-11 |
| 10061208 |
Photonic activation of reactants for sub-micron feature formation using depleted beams |
James Francis Mack |
2018-08-28 |
| 9953851 |
Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells |
2018-04-24 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Douglas E. Holmgren, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2018-03-27 |
| 9909925 |
Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction |
Heng Pan, Matthew S. Rogers, Aaron Muir Hunter |
2018-03-06 |
| 9908200 |
Apparatus and method of improving beam shaping and beam homogenization |
Bruce E. Adams, Samuel C. Howells, Dean Jennings, Jiping Li, Timothy N. Thomas |
2018-03-06 |
| 9904069 |
Apparatus and method for speckle reduction in laser processing equipment |
— |
2018-02-27 |
| 9869938 |
Photonic activation of reactants for sub-micron feature formation using depleted beams |
James Francis Mack |
2018-01-16 |
