Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Norman L. Tam +2 more | 2018-10-23 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Schubert S. Chu, Shay Assaf, Kim Vellore, Zhepeng CONG | 2018-05-01 |