Issued Patents 2018
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147623 | Pyrometry filter for thermal process chamber | Bruce E. Adams | 2018-12-04 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10128197 | Bottom processing | Aaron Muir Hunter, Swaminathan Srinivasan | 2018-11-13 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10083827 | Simplified lamp design | — | 2018-09-25 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 10056286 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |
| 10053777 | Thermal processing chamber | Aaron Muir Hunter | 2018-08-21 |
| 10026630 | Retention and insulation features for lamp | Dongming Iu, Oleg V. Serebryanov | 2018-07-17 |
| 10020204 | Bottom processing | Aaron Muir Hunter, Swaminathan Srinivasan | 2018-07-10 |
| 9929037 | Sol gel coated support ring | — | 2018-03-27 |
| 9929027 | Easy access lamphead | Oleg V. Serebryanov | 2018-03-27 |
| 9922815 | Adapter for replaceable lamp | Oleg V. Serebryanov | 2018-03-20 |
| 9905444 | Optics for controlling light transmitted through a conical quartz dome | — | 2018-02-27 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Xiaoxiong Yuan, Ashish Goel, Joung Joo Lee | 2018-02-27 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-01-16 |
| 9863043 | Window cooling using compliant material | Paul Brillhart | 2018-01-09 |
| 9863038 | Off-angled heating of the underside of a substrate using a lamp assembly | Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam | 2018-01-09 |