| 10147623 |
Pyrometry filter for thermal process chamber |
Bruce E. Adams |
2018-12-04 |
| 10132003 |
Heating modulators to improve epi uniformity tuning |
Shu-Kwan LAU, Surajit Kumar, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more |
2018-11-20 |
| 10128197 |
Bottom processing |
Aaron Muir Hunter, Swaminathan Srinivasan |
2018-11-13 |
| 10128144 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more |
2018-11-13 |
| 10083827 |
Simplified lamp design |
— |
2018-09-25 |
| 10077508 |
Multizone control of lamps in a conical lamphead using pyrometers |
Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more |
2018-09-18 |
| 10056286 |
Support ring with masked edge |
Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa |
2018-08-21 |
| 10053777 |
Thermal processing chamber |
Aaron Muir Hunter |
2018-08-21 |
| 10026630 |
Retention and insulation features for lamp |
Dongming Iu, Oleg V. Serebryanov |
2018-07-17 |
| 10020204 |
Bottom processing |
Aaron Muir Hunter, Swaminathan Srinivasan |
2018-07-10 |
| 9929037 |
Sol gel coated support ring |
— |
2018-03-27 |
| 9929027 |
Easy access lamphead |
Oleg V. Serebryanov |
2018-03-27 |
| 9922815 |
Adapter for replaceable lamp |
Oleg V. Serebryanov |
2018-03-20 |
| 9905444 |
Optics for controlling light transmitted through a conical quartz dome |
— |
2018-02-27 |
| 9905443 |
Reflective deposition rings and substrate processing chambers incorporating same |
Anantha K. Subramani, Xiaoxiong Yuan, Ashish Goel, Joung Joo Lee |
2018-02-27 |
| 9870919 |
Process chamber having separate process gas and purge gas regions |
Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more |
2018-01-16 |
| 9863043 |
Window cooling using compliant material |
Paul Brillhart |
2018-01-09 |
| 9863038 |
Off-angled heating of the underside of a substrate using a lamp assembly |
Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam |
2018-01-09 |
