Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10125415 | Structure for relaxed SiGe buffers including method and apparatus for forming | Errol Antonio C. Sanchez, Keun-Yong Ban, Xinyu BAO | 2018-11-13 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 10043870 | Method and structure to improve film stack with sensitive and reactive layers | Xinyu BAO, Errol Antonio C. Sanchez, David K. Carlson, Keun-Yong Ban | 2018-08-07 |
| 10043666 | Method for inter-chamber process | Xinyu BAO, Errol Antonio C. Sanchez, Keun-Yong Ban | 2018-08-07 |
| 9925569 | Chamber cleaning with infrared absorption gas | — | 2018-03-27 |
| 9923081 | Selective process for source and drain formation | Xinyu BAO, Flora Fong-Song CHANG, Abhishek Dube, Xuebin Li, Errol Antonio C. Sanchez +2 more | 2018-03-20 |
| 9890455 | Pre-heat ring designs to increase deposition uniformity and substrate throughput | Nyi O. Myo, John S. Webb, Masato Ishii, Xuebin Li, Ali Zojaji | 2018-02-13 |