Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah +1 more | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2018-11-06 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2018-09-18 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Shu-Kwan LAU, Jeffrey Tobin | 2018-02-27 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2018-01-16 |