Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10130958 | Showerhead assembly with gas injection distribution devices | Alexander Tam, Sumedh Acharya | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |