Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10130958 | Showerhead assembly with gas injection distribution devices | Alexander Tam, Anzhong Chang | 2018-11-20 |
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | David Masayuki Ishikawa, Paul J. Steffas, Brian H. Burrows | 2018-05-29 |