Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | Paul J. Steffas, Sumedh Acharya, Brian H. Burrows | 2018-05-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | Paul J. Steffas, Sumedh Acharya, Brian H. Burrows | 2018-05-29 |