Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | David Masayuki Ishikawa, Sumedh Acharya, Brian H. Burrows | 2018-05-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982364 | Process gas preheating systems and methods for double-sided multi-substrate batch processing | David Masayuki Ishikawa, Sumedh Acharya, Brian H. Burrows | 2018-05-29 |