Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10130958 | Showerhead assembly with gas injection distribution devices | Anzhong Chang, Sumedh Acharya | 2018-11-20 |
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Elisha Tam | 2018-08-28 |
| 9892941 | Multi-zone resistive heater | Anqing Cui, Binh Tran, Jacob Smith, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more | 2018-02-13 |