Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113236 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Nitin K. Ingle, Qiwei Liang | 2018-10-30 |
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Alexander Tam, Elisha Tam | 2018-08-28 |
| 10056233 | RPS assisted RF plasma source for semiconductor processing | Xinglong Chen, Saurabh Garg | 2018-08-21 |
| 10032606 | Semiconductor processing with DC assisted RF power for improved control | Xinglong Chen, Soonam Park, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman | 2018-07-24 |
| 9978564 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2018-05-22 |