Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113236 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2018-10-30 |
| 10083818 | Auto frequency tuned remote plasma source | Abdul Aziz Khaja, Mohamad A. Ayoub, Ramesh Bokka, Juan Carlos Rocha-Alvarez | 2018-09-25 |