Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113236 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle | 2018-10-30 |
| 10096466 | Pulsed plasma for film deposition | Jun Xue, Ludovic Godet, Srinivas D. Nemani, Michael W. Stowell, Douglas A. Buchberger, Jr. | 2018-10-09 |
| 10039157 | Workpiece processing chamber having a rotary microwave plasma source | Michael W. Stowell | 2018-07-31 |
| 9996745 | Blending of agricultural products via hyperspectral imaging and analysis | Seetharama C. Deevi, Henry M. Dante, Samuel Timothy Henry | 2018-06-12 |
| 9978564 | Chemical control features in wafer process equipment | Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2018-05-22 |
| 9905400 | Plasma reactor with non-power-absorbing dielectric gas shower plate assembly | Michael W. Stowell | 2018-02-27 |