Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096466 | Pulsed plasma for film deposition | Jun Xue, Ludovic Godet, Srinivas D. Nemani, Qiwei Liang, Douglas A. Buchberger, Jr. | 2018-10-09 |
| 10039157 | Workpiece processing chamber having a rotary microwave plasma source | Qiwei Liang | 2018-07-31 |
| 9997334 | Seedless particles with carbon allotropes | Bryce H. Anzelmo, Daniel Cook, Hossein-Ali Ghezelbash, Shreeyukta Singh, David Tanner | 2018-06-12 |
| 9928993 | Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide | — | 2018-03-27 |
| 9905400 | Plasma reactor with non-power-absorbing dielectric gas shower plate assembly | Qiwei Liang | 2018-02-27 |
| 9881775 | Waveform for improved energy control of sputtered species | — | 2018-01-30 |
| 9865484 | Selective etch using material modification and RF pulsing | Bhargav S. Citla, Chentsau Ying, Srinivas D. Nemani, Viachslav Babayan | 2018-01-09 |