Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964863 | Post exposure processing apparatus | Ludovic Godet, Kyle M. Hanson, Robert B. Moore | 2018-05-08 |
| 9958782 | Apparatus for post exposure bake | Kyle M. Hanson, Gregory J. Wilson | 2018-05-01 |
| 9865484 | Selective etch using material modification and RF pulsing | Bhargav S. Citla, Chentsau Ying, Srinivas D. Nemani, Michael W. Stowell | 2018-01-09 |