Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984867 | Systems and methods for rinsing and drying substrates | Ekaterina A. Mikhaylichenko, Brian J. Brown, Vincent Steffan Francischetti | 2018-05-29 |
| 9964863 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2018-05-08 |
| 9958782 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2018-05-01 |
| 9937802 | Systems and methods for determining a duty cycle for a variable voltage converter | Daniel Richard Luedtke, Yulei Chen, Fazal Urrahman Syed, Wei Xu | 2018-04-10 |
| 9864283 | Apparatus and methods for photomask backside cleaning | Jason Rye | 2018-01-09 |
| 9859135 | Substrate rinsing systems and methods | Jonathan Frankel, Brian J. Brown, Vincent Steffan Francischetti, Paul R. McHugh, Ekaterina A. Mikhaylichenko | 2018-01-02 |