Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984867 | Systems and methods for rinsing and drying substrates | Ekaterina A. Mikhaylichenko, Brian J. Brown, Kyle M. Hanson | 2018-05-29 |
| 9859135 | Substrate rinsing systems and methods | Jonathan Frankel, Brian J. Brown, Paul R. McHugh, Kyle M. Hanson, Ekaterina A. Mikhaylichenko | 2018-01-02 |