Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865464 | Nanocrystalline diamond carbon film for 3D NAND hardmask application | Yongmei Chen, Christopher S. Ngai, Jingjing Liu, Jun Xue, Ludovic Godet | 2018-01-09 |
| 9865484 | Selective etch using material modification and RF pulsing | Bhargav S. Citla, Srinivas D. Nemani, Viachslav Babayan, Michael W. Stowell | 2018-01-09 |