Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865464 | Nanocrystalline diamond carbon film for 3D NAND hardmask application | Yongmei Chen, Jingjing Liu, Jun Xue, Chentsau Ying, Ludovic Godet | 2018-01-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865464 | Nanocrystalline diamond carbon film for 3D NAND hardmask application | Yongmei Chen, Jingjing Liu, Jun Xue, Chentsau Ying, Ludovic Godet | 2018-01-09 |