Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131994 | Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-11-20 |
| 10096466 | Pulsed plasma for film deposition | Jun Xue, Ludovic Godet, Srinivas D. Nemani, Michael W. Stowell, Qiwei Liang | 2018-10-09 |
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2018-10-09 |
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays | 2018-06-05 |
| 9916967 | Fast response fluid control system | — | 2018-03-13 |
| 9896769 | Inductively coupled plasma source with multiple dielectric windows and window-supporting structure | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-02-20 |