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| 10096494 |
Substrate support with symmetrical feed structure |
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Yang Yang, Kartik Ramaswamy, Steven Lane, Lawrence Wong |
2018-07-10 |
| 10010912 |
Particle reduction via throttle gate valve purge |
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Thermal management of edge ring in semiconductor processing |
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2018-04-17 |
| 9896769 |
Inductively coupled plasma source with multiple dielectric windows and window-supporting structure |
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2018-02-20 |
