Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153139 | Multiple electrode substrate support assembly and phase control system | Yang Yang, Kartik Ramaswamy, Lawrence Wong, Shahid Rauf, Andrew Nguyen +2 more | 2018-12-11 |
| 10141166 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Richard Fovell | 2018-11-27 |
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon, Yang Yang | 2018-10-30 |
| 10017857 | Method and apparatus for controlling plasma near the edge of a substrate | Andrew Nguyen, Yang Yang, Kartik Ramaswamy, Lawrence Wong | 2018-07-10 |