Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon, Yang Yang | 2018-10-30 |
| 10109462 | Dual radio-frequency tuner for process control of a plasma process | Edward P. Hammond, IV, Abdul Aziz Khaja | 2018-10-23 |
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Muhammad M. Rasheed | 2018-08-28 |