Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096455 | Extended dark space shield | Thanh X. Nguyen, Rongjun Wang, Xianmin Tang | 2018-10-09 |
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung | 2018-08-28 |
| 9957601 | Apparatus for gas injection in a physical vapor deposition chamber | Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie, Isaac Porras, Keith A. Miller | 2018-05-01 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9914632 | Methods and apparatus for liquid chemical delivery | Ilker Durukan, Paul F. Ma | 2018-03-13 |
| 9914999 | Oxidized showerhead and process kit parts and methods of using same | Balasubramanian Ramachandran, Shih Chung Chen, Kevin A. PAPKE, Lei Zhou, Jing Zhou | 2018-03-13 |